ISO 11505:2025 pdf download,Surface chemical analysis – General procedures for quantitative compositional depth profiling by glow discharge optical emission spectrometry.
ISO 11505:2025 describes general procedures for quantitative compositional depth profiling using glow discharge optical emission spectrometry (GD-OES). It explains how GD-OES can determine the thickness, mass per unit area, and chemical composition of surface layer films by sputtering material with a glow discharge plasma and recording time-resolved optical emission. The standard emphasizes that the method converts qualitative depth profiles into quantitative results through calibration approaches, including accounting for sputtering behavior (sputter rates/factors) and establishing conditions that allow comparable depth-to-composition conversion. It also provides guidance on general test and measurement practices, covering suitable apparatus concepts, acquisition and evaluation principles, and the scope limitations—meaning it focuses on general quantification procedures rather than being directly applicable to every material system with arbitrary element sets and thickness variations.